3/21/2011	2:18:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	2:18:11 PM	Recipe started at 2:18 PM
3/21/2011	2:18:11 PM	H2 valve closed
3/21/2011	2:18:11 PM	BCl3 valve closed
3/21/2011	2:18:11 PM	PH3 valve closed
3/21/2011	2:18:11 PM	SiCl4 pre valve closed
3/21/2011	2:18:11 PM	SiCl4 post valve closed
3/21/2011	2:18:11 PM	Main Vac valve closed
3/21/2011	2:18:11 PM	Bypass valve closed
3/21/2011	2:18:11 PM	Bubbler valve closed
3/21/2011	2:18:11 PM	Helium valve opened
3/21/2011	2:18:11 PM	Helium MFC set to  500.000000
3/21/2011	2:18:11 PM	H2 MFC set to  0.000000
3/21/2011	2:18:11 PM	BCl3 MFC set to  0.000000
3/21/2011	2:18:11 PM	PHl3 MFC set to  0.000000
3/21/2011	2:18:11 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:18:11 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:18:11 PM	Tube furnace set to 0
3/21/2011	2:19:32 PM	Helium valve closed
3/21/2011	2:19:32 PM	H2 valve closed
3/21/2011	2:19:32 PM	BCl3 valve closed
3/21/2011	2:19:32 PM	PH3 valve closed
3/21/2011	2:19:32 PM	SiCl4 pre valve closed
3/21/2011	2:19:32 PM	SiCl4 post valve closed
3/21/2011	2:19:32 PM	Main Vac valve closed
3/21/2011	2:19:32 PM	Bypass valve closed
3/21/2011	2:19:32 PM	Bubbler valve closed
3/21/2011	2:19:32 PM	Helium MFC set to  0.000000
3/21/2011	2:19:32 PM	H2 MFC set to  0.000000
3/21/2011	2:19:32 PM	BCl3 MFC set to  0.000000
3/21/2011	2:19:32 PM	PHl3 MFC set to  0.000000
3/21/2011	2:19:32 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:19:32 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:19:32 PM	Tube furnace set to 0
3/21/2011	2:19:32 PM	Run finished at 2:19 PM
3/21/2011	2:19:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	2:42:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	2:42:37 PM	Recipe started at 2:42 PM
3/21/2011	2:42:37 PM	Helium valve closed
3/21/2011	2:42:37 PM	H2 valve closed
3/21/2011	2:42:37 PM	BCl3 valve closed
3/21/2011	2:42:37 PM	PH3 valve closed
3/21/2011	2:42:37 PM	SiCl4 pre valve closed
3/21/2011	2:42:37 PM	SiCl4 post valve closed
3/21/2011	2:42:37 PM	Main Vac valve closed
3/21/2011	2:42:37 PM	Bubbler valve closed
3/21/2011	2:42:37 PM	Bypass valve opened
3/21/2011	2:42:37 PM	Helium MFC set to  0.000000
3/21/2011	2:42:37 PM	H2 MFC set to  0.000000
3/21/2011	2:42:37 PM	BCl3 MFC set to  0.000000
3/21/2011	2:42:37 PM	PHl3 MFC set to  0.000000
3/21/2011	2:42:37 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:42:37 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:42:37 PM	Tube furnace set to 0
3/21/2011	2:42:37 PM	Run aborted at 2:42 PM
3/21/2011	2:42:37 PM	Helium valve closed
3/21/2011	2:42:37 PM	H2 valve closed
3/21/2011	2:42:37 PM	BCl3 valve closed
3/21/2011	2:42:37 PM	PH3 valve closed
3/21/2011	2:42:37 PM	SiCl4 pre valve closed
3/21/2011	2:42:37 PM	SiCl4 post valve closed
3/21/2011	2:42:37 PM	Bypass valve closed
3/21/2011	2:42:37 PM	Main Vac valve closed
3/21/2011	2:42:37 PM	Bubbler valve closed
3/21/2011	2:42:37 PM	Helium MFC set to  0.000000
3/21/2011	2:42:37 PM	H2 MFC set to  0.000000
3/21/2011	2:42:37 PM	BCl3 MFC set to  0.000000
3/21/2011	2:42:37 PM	PHl3 MFC set to  0.000000
3/21/2011	2:42:37 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:42:37 PM	Tube furnace set to 0
3/21/2011	2:42:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	2:42:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	2:42:42 PM	Recipe started at 2:42 PM
3/21/2011	2:42:42 PM	Helium valve closed
3/21/2011	2:42:42 PM	H2 valve closed
3/21/2011	2:42:42 PM	BCl3 valve closed
3/21/2011	2:42:42 PM	PH3 valve closed
3/21/2011	2:42:42 PM	SiCl4 pre valve closed
3/21/2011	2:42:42 PM	SiCl4 post valve closed
3/21/2011	2:42:42 PM	Main Vac valve closed
3/21/2011	2:42:42 PM	Bubbler valve closed
3/21/2011	2:42:42 PM	Bypass valve opened
3/21/2011	2:42:42 PM	Helium MFC set to  0.000000
3/21/2011	2:42:42 PM	H2 MFC set to  0.000000
3/21/2011	2:42:42 PM	BCl3 MFC set to  0.000000
3/21/2011	2:42:42 PM	PHl3 MFC set to  0.000000
3/21/2011	2:42:42 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:42:42 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:42:42 PM	Tube furnace set to 0
3/21/2011	2:43:13 PM	Helium valve closed
3/21/2011	2:43:13 PM	H2 valve closed
3/21/2011	2:43:13 PM	BCl3 valve closed
3/21/2011	2:43:13 PM	PH3 valve closed
3/21/2011	2:43:13 PM	SiCl4 pre valve closed
3/21/2011	2:43:13 PM	SiCl4 post valve closed
3/21/2011	2:43:13 PM	Bubbler valve closed
3/21/2011	2:43:13 PM	Main Vac valve opened
3/21/2011	2:43:13 PM	Bypass valve opened
3/21/2011	2:43:13 PM	Helium MFC set to  0.000000
3/21/2011	2:43:13 PM	H2 MFC set to  0.000000
3/21/2011	2:43:13 PM	BCl3 MFC set to  0.000000
3/21/2011	2:43:13 PM	PHl3 MFC set to  0.000000
3/21/2011	2:43:13 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:43:13 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:43:13 PM	Tube furnace set to 0
3/21/2011	2:43:14 PM	Run finished at 2:43 PM
3/21/2011	2:43:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	2:49:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	2:49:15 PM	Recipe started at 2:49 PM
3/21/2011	2:49:15 PM	Helium valve closed
3/21/2011	2:49:15 PM	H2 valve closed
3/21/2011	2:49:15 PM	BCl3 valve closed
3/21/2011	2:49:15 PM	PH3 valve closed
3/21/2011	2:49:15 PM	SiCl4 pre valve closed
3/21/2011	2:49:15 PM	SiCl4 post valve closed
3/21/2011	2:49:15 PM	Main Vac valve closed
3/21/2011	2:49:15 PM	Bubbler valve closed
3/21/2011	2:49:15 PM	Bypass valve opened
3/21/2011	2:49:15 PM	Helium MFC set to  0.000000
3/21/2011	2:49:15 PM	H2 MFC set to  0.000000
3/21/2011	2:49:15 PM	BCl3 MFC set to  0.000000
3/21/2011	2:49:15 PM	PHl3 MFC set to  0.000000
3/21/2011	2:49:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:49:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:49:15 PM	Tube furnace set to 0
3/21/2011	2:49:15 PM	Helium valve closed
3/21/2011	2:49:15 PM	H2 valve closed
3/21/2011	2:49:15 PM	BCl3 valve closed
3/21/2011	2:49:15 PM	PH3 valve closed
3/21/2011	2:49:15 PM	SiCl4 pre valve closed
3/21/2011	2:49:15 PM	SiCl4 post valve closed
3/21/2011	2:49:15 PM	Bubbler valve closed
3/21/2011	2:49:15 PM	Main Vac valve opened
3/21/2011	2:49:15 PM	Bypass valve opened
3/21/2011	2:49:15 PM	Helium MFC set to  0.000000
3/21/2011	2:49:15 PM	H2 MFC set to  0.000000
3/21/2011	2:49:15 PM	BCl3 MFC set to  0.000000
3/21/2011	2:49:15 PM	PHl3 MFC set to  0.000000
3/21/2011	2:49:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:49:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:49:15 PM	Tube furnace set to 0
3/21/2011	2:50:15 PM	H2 valve closed
3/21/2011	2:50:15 PM	BCl3 valve closed
3/21/2011	2:50:15 PM	PH3 valve closed
3/21/2011	2:50:15 PM	SiCl4 pre valve closed
3/21/2011	2:50:15 PM	SiCl4 post valve closed
3/21/2011	2:50:15 PM	Bubbler valve closed
3/21/2011	2:50:15 PM	Helium valve opened
3/21/2011	2:50:15 PM	Main Vac valve opened
3/21/2011	2:50:15 PM	Bypass valve opened
3/21/2011	2:50:15 PM	Helium MFC set to  100.000000
3/21/2011	2:50:15 PM	H2 MFC set to  0.000000
3/21/2011	2:50:15 PM	BCl3 MFC set to  0.000000
3/21/2011	2:50:15 PM	PHl3 MFC set to  0.000000
3/21/2011	2:50:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:50:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:50:16 PM	Tube furnace set to 0
3/21/2011	2:51:16 PM	Helium valve closed
3/21/2011	2:51:16 PM	H2 valve closed
3/21/2011	2:51:16 PM	BCl3 valve closed
3/21/2011	2:51:16 PM	PH3 valve closed
3/21/2011	2:51:16 PM	SiCl4 pre valve closed
3/21/2011	2:51:16 PM	SiCl4 post valve closed
3/21/2011	2:51:16 PM	Bubbler valve closed
3/21/2011	2:51:16 PM	Main Vac valve opened
3/21/2011	2:51:16 PM	Bypass valve opened
3/21/2011	2:51:16 PM	Helium MFC set to  0.000000
3/21/2011	2:51:16 PM	H2 MFC set to  0.000000
3/21/2011	2:51:16 PM	BCl3 MFC set to  0.000000
3/21/2011	2:51:16 PM	PHl3 MFC set to  0.000000
3/21/2011	2:51:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:51:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:51:16 PM	Tube furnace set to 0
3/21/2011	2:52:16 PM	H2 valve closed
3/21/2011	2:52:16 PM	BCl3 valve closed
3/21/2011	2:52:16 PM	PH3 valve closed
3/21/2011	2:52:16 PM	SiCl4 pre valve closed
3/21/2011	2:52:16 PM	SiCl4 post valve closed
3/21/2011	2:52:16 PM	Bubbler valve closed
3/21/2011	2:52:16 PM	Helium valve opened
3/21/2011	2:52:16 PM	Main Vac valve opened
3/21/2011	2:52:16 PM	Bypass valve opened
3/21/2011	2:52:16 PM	Helium MFC set to  100.000000
3/21/2011	2:52:16 PM	H2 MFC set to  0.000000
3/21/2011	2:52:16 PM	BCl3 MFC set to  0.000000
3/21/2011	2:52:16 PM	PHl3 MFC set to  0.000000
3/21/2011	2:52:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:52:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:52:16 PM	Tube furnace set to 0
3/21/2011	2:53:16 PM	Helium valve closed
3/21/2011	2:53:16 PM	H2 valve closed
3/21/2011	2:53:16 PM	BCl3 valve closed
3/21/2011	2:53:16 PM	PH3 valve closed
3/21/2011	2:53:16 PM	SiCl4 pre valve closed
3/21/2011	2:53:16 PM	SiCl4 post valve closed
3/21/2011	2:53:16 PM	Bubbler valve closed
3/21/2011	2:53:16 PM	Main Vac valve opened
3/21/2011	2:53:16 PM	Bypass valve opened
3/21/2011	2:53:16 PM	Helium MFC set to  0.000000
3/21/2011	2:53:16 PM	H2 MFC set to  0.000000
3/21/2011	2:53:16 PM	BCl3 MFC set to  0.000000
3/21/2011	2:53:16 PM	PHl3 MFC set to  0.000000
3/21/2011	2:53:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:53:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:53:16 PM	Tube furnace set to 0
3/21/2011	2:54:16 PM	H2 valve closed
3/21/2011	2:54:16 PM	BCl3 valve closed
3/21/2011	2:54:16 PM	PH3 valve closed
3/21/2011	2:54:16 PM	SiCl4 pre valve closed
3/21/2011	2:54:16 PM	SiCl4 post valve closed
3/21/2011	2:54:16 PM	Bubbler valve closed
3/21/2011	2:54:16 PM	Helium valve opened
3/21/2011	2:54:16 PM	Main Vac valve opened
3/21/2011	2:54:16 PM	Bypass valve opened
3/21/2011	2:54:16 PM	Helium MFC set to  100.000000
3/21/2011	2:54:16 PM	H2 MFC set to  0.000000
3/21/2011	2:54:16 PM	BCl3 MFC set to  0.000000
3/21/2011	2:54:16 PM	PHl3 MFC set to  0.000000
3/21/2011	2:54:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:54:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:54:16 PM	Tube furnace set to 0
3/21/2011	2:55:16 PM	Helium valve closed
3/21/2011	2:55:16 PM	H2 valve closed
3/21/2011	2:55:16 PM	BCl3 valve closed
3/21/2011	2:55:16 PM	PH3 valve closed
3/21/2011	2:55:16 PM	SiCl4 pre valve closed
3/21/2011	2:55:16 PM	SiCl4 post valve closed
3/21/2011	2:55:16 PM	Bubbler valve closed
3/21/2011	2:55:16 PM	Main Vac valve opened
3/21/2011	2:55:16 PM	Bypass valve opened
3/21/2011	2:55:16 PM	Helium MFC set to  0.000000
3/21/2011	2:55:16 PM	H2 MFC set to  0.000000
3/21/2011	2:55:16 PM	BCl3 MFC set to  0.000000
3/21/2011	2:55:16 PM	PHl3 MFC set to  0.000000
3/21/2011	2:55:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:55:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:55:17 PM	Tube furnace set to 0
3/21/2011	2:56:17 PM	H2 valve closed
3/21/2011	2:56:17 PM	BCl3 valve closed
3/21/2011	2:56:17 PM	PH3 valve closed
3/21/2011	2:56:17 PM	SiCl4 pre valve closed
3/21/2011	2:56:17 PM	SiCl4 post valve closed
3/21/2011	2:56:17 PM	Bubbler valve closed
3/21/2011	2:56:17 PM	Helium valve opened
3/21/2011	2:56:17 PM	Main Vac valve opened
3/21/2011	2:56:17 PM	Bypass valve opened
3/21/2011	2:56:17 PM	Helium MFC set to  100.000000
3/21/2011	2:56:17 PM	H2 MFC set to  0.000000
3/21/2011	2:56:17 PM	BCl3 MFC set to  0.000000
3/21/2011	2:56:17 PM	PHl3 MFC set to  0.000000
3/21/2011	2:56:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:56:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:56:17 PM	Tube furnace set to 0
3/21/2011	2:57:17 PM	Helium valve closed
3/21/2011	2:57:17 PM	H2 valve closed
3/21/2011	2:57:17 PM	BCl3 valve closed
3/21/2011	2:57:17 PM	PH3 valve closed
3/21/2011	2:57:17 PM	SiCl4 pre valve closed
3/21/2011	2:57:17 PM	SiCl4 post valve closed
3/21/2011	2:57:17 PM	Bubbler valve closed
3/21/2011	2:57:17 PM	Main Vac valve opened
3/21/2011	2:57:17 PM	Bypass valve opened
3/21/2011	2:57:17 PM	Helium MFC set to  0.000000
3/21/2011	2:57:17 PM	H2 MFC set to  0.000000
3/21/2011	2:57:17 PM	BCl3 MFC set to  0.000000
3/21/2011	2:57:17 PM	PHl3 MFC set to  0.000000
3/21/2011	2:57:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:57:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:57:17 PM	Tube furnace set to 0
3/21/2011	2:58:17 PM	H2 valve closed
3/21/2011	2:58:17 PM	BCl3 valve closed
3/21/2011	2:58:17 PM	PH3 valve closed
3/21/2011	2:58:17 PM	SiCl4 pre valve closed
3/21/2011	2:58:17 PM	SiCl4 post valve closed
3/21/2011	2:58:17 PM	Bubbler valve closed
3/21/2011	2:58:17 PM	Helium valve opened
3/21/2011	2:58:17 PM	Main Vac valve opened
3/21/2011	2:58:17 PM	Bypass valve opened
3/21/2011	2:58:17 PM	Helium MFC set to  100.000000
3/21/2011	2:58:17 PM	H2 MFC set to  0.000000
3/21/2011	2:58:17 PM	BCl3 MFC set to  0.000000
3/21/2011	2:58:17 PM	PHl3 MFC set to  0.000000
3/21/2011	2:58:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:58:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:58:17 PM	Tube furnace set to 0
3/21/2011	2:59:17 PM	Helium valve closed
3/21/2011	2:59:17 PM	H2 valve closed
3/21/2011	2:59:17 PM	BCl3 valve closed
3/21/2011	2:59:17 PM	PH3 valve closed
3/21/2011	2:59:17 PM	SiCl4 pre valve closed
3/21/2011	2:59:17 PM	SiCl4 post valve closed
3/21/2011	2:59:17 PM	Bubbler valve closed
3/21/2011	2:59:17 PM	Main Vac valve opened
3/21/2011	2:59:17 PM	Bypass valve opened
3/21/2011	2:59:17 PM	Helium MFC set to  0.000000
3/21/2011	2:59:17 PM	H2 MFC set to  0.000000
3/21/2011	2:59:17 PM	BCl3 MFC set to  0.000000
3/21/2011	2:59:17 PM	PHl3 MFC set to  0.000000
3/21/2011	2:59:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	2:59:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	2:59:17 PM	Tube furnace set to 0
3/21/2011	3:00:17 PM	H2 valve closed
3/21/2011	3:00:17 PM	BCl3 valve closed
3/21/2011	3:00:17 PM	PH3 valve closed
3/21/2011	3:00:17 PM	SiCl4 pre valve closed
3/21/2011	3:00:17 PM	SiCl4 post valve closed
3/21/2011	3:00:17 PM	Bubbler valve closed
3/21/2011	3:00:17 PM	Helium valve opened
3/21/2011	3:00:17 PM	Main Vac valve opened
3/21/2011	3:00:17 PM	Bypass valve opened
3/21/2011	3:00:17 PM	Helium MFC set to  100.000000
3/21/2011	3:00:17 PM	H2 MFC set to  0.000000
3/21/2011	3:00:17 PM	BCl3 MFC set to  0.000000
3/21/2011	3:00:17 PM	PHl3 MFC set to  0.000000
3/21/2011	3:00:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:00:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:00:18 PM	Tube furnace set to 0
3/21/2011	3:01:18 PM	Helium valve closed
3/21/2011	3:01:18 PM	H2 valve closed
3/21/2011	3:01:18 PM	BCl3 valve closed
3/21/2011	3:01:18 PM	PH3 valve closed
3/21/2011	3:01:18 PM	SiCl4 pre valve closed
3/21/2011	3:01:18 PM	SiCl4 post valve closed
3/21/2011	3:01:18 PM	Bubbler valve closed
3/21/2011	3:01:18 PM	Main Vac valve opened
3/21/2011	3:01:18 PM	Bypass valve opened
3/21/2011	3:01:18 PM	Helium MFC set to  0.000000
3/21/2011	3:01:18 PM	H2 MFC set to  0.000000
3/21/2011	3:01:18 PM	BCl3 MFC set to  0.000000
3/21/2011	3:01:18 PM	PHl3 MFC set to  0.000000
3/21/2011	3:01:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:01:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:01:18 PM	Tube furnace set to 0
3/21/2011	3:02:18 PM	H2 valve closed
3/21/2011	3:02:18 PM	BCl3 valve closed
3/21/2011	3:02:18 PM	PH3 valve closed
3/21/2011	3:02:18 PM	SiCl4 pre valve closed
3/21/2011	3:02:18 PM	SiCl4 post valve closed
3/21/2011	3:02:18 PM	Bubbler valve closed
3/21/2011	3:02:18 PM	Helium valve opened
3/21/2011	3:02:18 PM	Main Vac valve opened
3/21/2011	3:02:18 PM	Bypass valve opened
3/21/2011	3:02:18 PM	Helium MFC set to  100.000000
3/21/2011	3:02:18 PM	H2 MFC set to  0.000000
3/21/2011	3:02:18 PM	BCl3 MFC set to  0.000000
3/21/2011	3:02:18 PM	PHl3 MFC set to  0.000000
3/21/2011	3:02:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:02:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:02:18 PM	Tube furnace set to 0
3/21/2011	3:03:18 PM	Helium valve closed
3/21/2011	3:03:18 PM	H2 valve closed
3/21/2011	3:03:18 PM	BCl3 valve closed
3/21/2011	3:03:18 PM	PH3 valve closed
3/21/2011	3:03:18 PM	SiCl4 pre valve closed
3/21/2011	3:03:18 PM	SiCl4 post valve closed
3/21/2011	3:03:18 PM	Bubbler valve closed
3/21/2011	3:03:18 PM	Main Vac valve opened
3/21/2011	3:03:18 PM	Bypass valve opened
3/21/2011	3:03:18 PM	Helium MFC set to  0.000000
3/21/2011	3:03:18 PM	H2 MFC set to  0.000000
3/21/2011	3:03:18 PM	BCl3 MFC set to  0.000000
3/21/2011	3:03:18 PM	PHl3 MFC set to  0.000000
3/21/2011	3:03:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:03:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:03:18 PM	Tube furnace set to 0
3/21/2011	3:04:18 PM	H2 valve closed
3/21/2011	3:04:18 PM	BCl3 valve closed
3/21/2011	3:04:18 PM	PH3 valve closed
3/21/2011	3:04:18 PM	SiCl4 pre valve closed
3/21/2011	3:04:18 PM	SiCl4 post valve closed
3/21/2011	3:04:18 PM	Bubbler valve closed
3/21/2011	3:04:18 PM	Helium valve opened
3/21/2011	3:04:18 PM	Main Vac valve opened
3/21/2011	3:04:18 PM	Bypass valve opened
3/21/2011	3:04:18 PM	Helium MFC set to  100.000000
3/21/2011	3:04:18 PM	H2 MFC set to  0.000000
3/21/2011	3:04:18 PM	BCl3 MFC set to  0.000000
3/21/2011	3:04:18 PM	PHl3 MFC set to  0.000000
3/21/2011	3:04:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:04:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:04:18 PM	Tube furnace set to 0
3/21/2011	3:05:18 PM	Helium valve closed
3/21/2011	3:05:18 PM	H2 valve closed
3/21/2011	3:05:18 PM	BCl3 valve closed
3/21/2011	3:05:18 PM	PH3 valve closed
3/21/2011	3:05:18 PM	SiCl4 pre valve closed
3/21/2011	3:05:18 PM	SiCl4 post valve closed
3/21/2011	3:05:18 PM	Bubbler valve closed
3/21/2011	3:05:18 PM	Main Vac valve opened
3/21/2011	3:05:18 PM	Bypass valve opened
3/21/2011	3:05:18 PM	Helium MFC set to  0.000000
3/21/2011	3:05:18 PM	H2 MFC set to  0.000000
3/21/2011	3:05:18 PM	BCl3 MFC set to  0.000000
3/21/2011	3:05:18 PM	PHl3 MFC set to  0.000000
3/21/2011	3:05:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:05:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:05:19 PM	Tube furnace set to 0
3/21/2011	3:06:19 PM	H2 valve closed
3/21/2011	3:06:19 PM	BCl3 valve closed
3/21/2011	3:06:19 PM	PH3 valve closed
3/21/2011	3:06:19 PM	SiCl4 pre valve closed
3/21/2011	3:06:19 PM	SiCl4 post valve closed
3/21/2011	3:06:19 PM	Bubbler valve closed
3/21/2011	3:06:19 PM	Helium valve opened
3/21/2011	3:06:19 PM	Main Vac valve opened
3/21/2011	3:06:19 PM	Bypass valve opened
3/21/2011	3:06:19 PM	Helium MFC set to  100.000000
3/21/2011	3:06:19 PM	H2 MFC set to  0.000000
3/21/2011	3:06:19 PM	BCl3 MFC set to  0.000000
3/21/2011	3:06:19 PM	PHl3 MFC set to  0.000000
3/21/2011	3:06:19 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:06:19 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:06:19 PM	Tube furnace set to 0
3/21/2011	3:07:19 PM	Helium valve closed
3/21/2011	3:07:19 PM	H2 valve closed
3/21/2011	3:07:19 PM	BCl3 valve closed
3/21/2011	3:07:19 PM	PH3 valve closed
3/21/2011	3:07:19 PM	SiCl4 pre valve closed
3/21/2011	3:07:19 PM	SiCl4 post valve closed
3/21/2011	3:07:19 PM	Bubbler valve closed
3/21/2011	3:07:19 PM	Main Vac valve opened
3/21/2011	3:07:19 PM	Bypass valve opened
3/21/2011	3:07:19 PM	Helium MFC set to  0.000000
3/21/2011	3:07:19 PM	H2 MFC set to  0.000000
3/21/2011	3:07:19 PM	BCl3 MFC set to  0.000000
3/21/2011	3:07:19 PM	PHl3 MFC set to  0.000000
3/21/2011	3:07:19 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:07:19 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:07:19 PM	Tube furnace set to 0
3/21/2011	3:08:19 PM	H2 valve closed
3/21/2011	3:08:19 PM	BCl3 valve closed
3/21/2011	3:08:19 PM	PH3 valve closed
3/21/2011	3:08:19 PM	SiCl4 pre valve closed
3/21/2011	3:08:19 PM	SiCl4 post valve closed
3/21/2011	3:08:19 PM	Bubbler valve closed
3/21/2011	3:08:19 PM	Helium valve opened
3/21/2011	3:08:19 PM	Main Vac valve opened
3/21/2011	3:08:19 PM	Bypass valve opened
3/21/2011	3:08:19 PM	Helium MFC set to  100.000000
3/21/2011	3:08:19 PM	H2 MFC set to  0.000000
3/21/2011	3:08:19 PM	BCl3 MFC set to  0.000000
3/21/2011	3:08:19 PM	PHl3 MFC set to  0.000000
3/21/2011	3:08:19 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:08:19 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:08:19 PM	Tube furnace set to 0
3/21/2011	3:09:19 PM	Helium valve closed
3/21/2011	3:09:19 PM	H2 valve closed
3/21/2011	3:09:19 PM	BCl3 valve closed
3/21/2011	3:09:19 PM	PH3 valve closed
3/21/2011	3:09:19 PM	SiCl4 pre valve closed
3/21/2011	3:09:19 PM	SiCl4 post valve closed
3/21/2011	3:09:19 PM	Bubbler valve closed
3/21/2011	3:09:19 PM	Main Vac valve opened
3/21/2011	3:09:19 PM	Bypass valve opened
3/21/2011	3:09:19 PM	Helium MFC set to  0.000000
3/21/2011	3:09:19 PM	H2 MFC set to  0.000000
3/21/2011	3:09:19 PM	BCl3 MFC set to  0.000000
3/21/2011	3:09:19 PM	PHl3 MFC set to  0.000000
3/21/2011	3:09:19 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:09:19 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:09:19 PM	Tube furnace set to 0
3/21/2011	3:09:20 PM	Run finished at 3:09 PM
3/21/2011	3:09:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	3:10:17 PM	Helium MFC set to  0.000000
3/21/2011	3:10:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	3:10:33 PM	Recipe started at 3:10 PM
3/21/2011	3:10:33 PM	Helium valve closed
3/21/2011	3:10:33 PM	H2 valve closed
3/21/2011	3:10:33 PM	BCl3 valve closed
3/21/2011	3:10:33 PM	PH3 valve closed
3/21/2011	3:10:33 PM	SiCl4 pre valve closed
3/21/2011	3:10:33 PM	SiCl4 post valve closed
3/21/2011	3:10:33 PM	Main Vac valve closed
3/21/2011	3:10:33 PM	Bubbler valve closed
3/21/2011	3:10:33 PM	Bypass valve opened
3/21/2011	3:10:33 PM	Helium MFC set to  0.000000
3/21/2011	3:10:33 PM	H2 MFC set to  0.000000
3/21/2011	3:10:33 PM	BCl3 MFC set to  0.000000
3/21/2011	3:10:33 PM	PHl3 MFC set to  0.000000
3/21/2011	3:10:33 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:10:33 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:10:33 PM	Tube furnace set to 0
3/21/2011	3:10:34 PM	Helium valve closed
3/21/2011	3:10:34 PM	H2 valve closed
3/21/2011	3:10:34 PM	BCl3 valve closed
3/21/2011	3:10:34 PM	PH3 valve closed
3/21/2011	3:10:34 PM	SiCl4 pre valve closed
3/21/2011	3:10:34 PM	SiCl4 post valve closed
3/21/2011	3:10:34 PM	Bubbler valve closed
3/21/2011	3:10:34 PM	Main Vac valve opened
3/21/2011	3:10:34 PM	Bypass valve opened
3/21/2011	3:10:34 PM	Helium MFC set to  0.000000
3/21/2011	3:10:34 PM	H2 MFC set to  0.000000
3/21/2011	3:10:34 PM	BCl3 MFC set to  0.000000
3/21/2011	3:10:34 PM	PHl3 MFC set to  0.000000
3/21/2011	3:10:34 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:10:34 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:10:34 PM	Tube furnace set to 0
3/21/2011	3:10:43 PM	Run aborted at 3:10 PM
3/21/2011	3:10:43 PM	Helium valve closed
3/21/2011	3:10:43 PM	H2 valve closed
3/21/2011	3:10:43 PM	BCl3 valve closed
3/21/2011	3:10:43 PM	PH3 valve closed
3/21/2011	3:10:43 PM	SiCl4 pre valve closed
3/21/2011	3:10:43 PM	SiCl4 post valve closed
3/21/2011	3:10:43 PM	Bypass valve closed
3/21/2011	3:10:43 PM	Main Vac valve closed
3/21/2011	3:10:43 PM	Bubbler valve closed
3/21/2011	3:10:43 PM	Helium MFC set to  0.000000
3/21/2011	3:10:43 PM	H2 MFC set to  0.000000
3/21/2011	3:10:43 PM	BCl3 MFC set to  0.000000
3/21/2011	3:10:43 PM	PHl3 MFC set to  0.000000
3/21/2011	3:10:43 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:10:43 PM	Tube furnace set to 0
3/21/2011	3:10:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	3:10:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	3:10:47 PM	Recipe started at 3:10 PM
3/21/2011	3:10:47 PM	Helium valve closed
3/21/2011	3:10:47 PM	H2 valve closed
3/21/2011	3:10:47 PM	BCl3 valve closed
3/21/2011	3:10:47 PM	PH3 valve closed
3/21/2011	3:10:47 PM	SiCl4 pre valve closed
3/21/2011	3:10:47 PM	SiCl4 post valve closed
3/21/2011	3:10:47 PM	Main Vac valve closed
3/21/2011	3:10:47 PM	Bubbler valve closed
3/21/2011	3:10:47 PM	Bypass valve opened
3/21/2011	3:10:47 PM	Helium MFC set to  0.000000
3/21/2011	3:10:47 PM	H2 MFC set to  0.000000
3/21/2011	3:10:47 PM	BCl3 MFC set to  0.000000
3/21/2011	3:10:47 PM	PHl3 MFC set to  0.000000
3/21/2011	3:10:47 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:10:47 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:10:47 PM	Tube furnace set to 0
3/21/2011	3:10:47 PM	Helium valve closed
3/21/2011	3:10:47 PM	H2 valve closed
3/21/2011	3:10:47 PM	BCl3 valve closed
3/21/2011	3:10:47 PM	PH3 valve closed
3/21/2011	3:10:47 PM	SiCl4 pre valve closed
3/21/2011	3:10:47 PM	SiCl4 post valve closed
3/21/2011	3:10:47 PM	Bubbler valve closed
3/21/2011	3:10:47 PM	Main Vac valve opened
3/21/2011	3:10:47 PM	Bypass valve opened
3/21/2011	3:10:47 PM	Helium MFC set to  0.000000
3/21/2011	3:10:47 PM	H2 MFC set to  0.000000
3/21/2011	3:10:47 PM	BCl3 MFC set to  0.000000
3/21/2011	3:10:47 PM	PHl3 MFC set to  0.000000
3/21/2011	3:10:47 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:10:47 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:10:48 PM	Tube furnace set to 0
3/21/2011	3:10:48 PM	Run finished at 3:10 PM
3/21/2011	3:10:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	3:10:52 PM	Helium MFC set to  100.000000
3/21/2011	3:10:54 PM	Helium valve opened
3/21/2011	3:14:46 PM	Helium valve closed
3/21/2011	3:14:49 PM	Helium MFC set to  0.000000
3/21/2011	3:16:37 PM	Helium MFC set to  100.000000
3/21/2011	3:16:39 PM	Helium valve opened
3/21/2011	3:18:35 PM	Helium MFC set to  500.000000
3/21/2011	3:22:24 PM	Helium MFC set to  100.000000
3/21/2011	3:22:27 PM	Helium valve closed
3/21/2011	3:22:33 PM	Helium MFC set to  0.000000
3/21/2011	3:23:28 PM	Helium MFC set to  100.000000
3/21/2011	3:23:30 PM	Helium valve opened
3/21/2011	3:23:39 PM	Helium MFC set to  500.000000
3/21/2011	3:31:16 PM	Helium MFC set to  100.000000
3/21/2011	3:31:27 PM	Helium valve closed
3/21/2011	3:32:19 PM	Helium valve opened
3/21/2011	3:32:25 PM	Helium MFC set to  500.000000
3/21/2011	3:36:40 PM	Helium MFC set to  100.000000
3/21/2011	3:36:45 PM	Helium valve closed
3/21/2011	3:37:31 PM	Recipe started at 3:37 PM
3/21/2011	3:37:31 PM	Helium valve closed
3/21/2011	3:37:31 PM	BCl3 valve closed
3/21/2011	3:37:31 PM	PH3 valve closed
3/21/2011	3:37:31 PM	SiCl4 pre valve closed
3/21/2011	3:37:31 PM	SiCl4 post valve closed
3/21/2011	3:37:31 PM	Main Vac valve closed
3/21/2011	3:37:31 PM	Bypass valve closed
3/21/2011	3:37:31 PM	Bubbler valve closed
3/21/2011	3:37:31 PM	H2 valve opened
3/21/2011	3:37:31 PM	Helium MFC set to  0.000000
3/21/2011	3:37:31 PM	H2 MFC set to  500.000000
3/21/2011	3:37:31 PM	BCl3 MFC set to  0.000000
3/21/2011	3:37:31 PM	PHl3 MFC set to  0.000000
3/21/2011	3:37:31 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:37:31 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:37:31 PM	Tube furnace set to 1000
3/21/2011	3:38:48 PM	Helium valve closed
3/21/2011	3:38:48 PM	BCl3 valve closed
3/21/2011	3:38:48 PM	PH3 valve closed
3/21/2011	3:38:48 PM	SiCl4 pre valve closed
3/21/2011	3:38:48 PM	SiCl4 post valve closed
3/21/2011	3:38:48 PM	Main Vac valve closed
3/21/2011	3:38:48 PM	Bypass valve closed
3/21/2011	3:38:48 PM	H2 valve opened
3/21/2011	3:38:48 PM	Bubbler valve opened
3/21/2011	3:38:48 PM	Helium MFC set to  0.000000
3/21/2011	3:38:48 PM	H2 MFC set to  500.000000
3/21/2011	3:38:48 PM	BCl3 MFC set to  0.000000
3/21/2011	3:38:48 PM	PHl3 MFC set to  0.000000
3/21/2011	3:38:48 PM	SiCl4 MFC set to  0.000000
3/21/2011	3:38:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:38:48 PM	Tube furnace set to 1000
3/21/2011	3:58:48 PM	Helium valve closed
3/21/2011	3:58:48 PM	PH3 valve closed
3/21/2011	3:58:48 PM	Main Vac valve closed
3/21/2011	3:58:48 PM	Bypass valve closed
3/21/2011	3:58:48 PM	H2 valve opened
3/21/2011	3:58:48 PM	BCl3 valve opened
3/21/2011	3:58:48 PM	SiCl4 pre valve opened
3/21/2011	3:58:48 PM	SiCl4 post valve opened
3/21/2011	3:58:48 PM	Bubbler valve opened
3/21/2011	3:58:48 PM	Helium MFC set to  0.000000
3/21/2011	3:58:48 PM	H2 MFC set to  500.000000
3/21/2011	3:58:48 PM	BCl3 MFC set to  2.000000
3/21/2011	3:58:48 PM	PHl3 MFC set to  0.000000
3/21/2011	3:58:48 PM	SiCl4 MFC set to  50.000000
3/21/2011	3:58:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	3:58:48 PM	Tube furnace set to 1000
3/21/2011	4:10:48 PM	Helium valve closed
3/21/2011	4:10:48 PM	BCl3 valve closed
3/21/2011	4:10:48 PM	PH3 valve closed
3/21/2011	4:10:48 PM	SiCl4 pre valve closed
3/21/2011	4:10:48 PM	SiCl4 post valve closed
3/21/2011	4:10:48 PM	Main Vac valve closed
3/21/2011	4:10:48 PM	Bypass valve closed
3/21/2011	4:10:48 PM	H2 valve opened
3/21/2011	4:10:48 PM	Bubbler valve opened
3/21/2011	4:10:48 PM	Helium MFC set to  0.000000
3/21/2011	4:10:48 PM	H2 MFC set to  500.000000
3/21/2011	4:10:48 PM	BCl3 MFC set to  0.000000
3/21/2011	4:10:48 PM	PHl3 MFC set to  0.000000
3/21/2011	4:10:48 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:10:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:10:49 PM	Tube furnace set to 750
3/21/2011	4:30:49 PM	H2 valve closed
3/21/2011	4:30:49 PM	BCl3 valve closed
3/21/2011	4:30:49 PM	PH3 valve closed
3/21/2011	4:30:49 PM	SiCl4 pre valve closed
3/21/2011	4:30:49 PM	SiCl4 post valve closed
3/21/2011	4:30:49 PM	Main Vac valve closed
3/21/2011	4:30:49 PM	Bypass valve closed
3/21/2011	4:30:49 PM	Helium valve opened
3/21/2011	4:30:49 PM	Bubbler valve opened
3/21/2011	4:30:49 PM	Helium MFC set to  500.000000
3/21/2011	4:30:49 PM	H2 MFC set to  0.000000
3/21/2011	4:30:49 PM	BCl3 MFC set to  0.000000
3/21/2011	4:30:49 PM	PHl3 MFC set to  0.000000
3/21/2011	4:30:49 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:30:49 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:30:49 PM	Tube furnace set to 0
3/21/2011	4:37:06 PM	Helium valve closed
3/21/2011	4:37:06 PM	H2 valve closed
3/21/2011	4:37:06 PM	BCl3 valve closed
3/21/2011	4:37:06 PM	PH3 valve closed
3/21/2011	4:37:06 PM	SiCl4 pre valve closed
3/21/2011	4:37:06 PM	SiCl4 post valve closed
3/21/2011	4:37:06 PM	Main Vac valve closed
3/21/2011	4:37:06 PM	Bypass valve closed
3/21/2011	4:37:06 PM	Bubbler valve closed
3/21/2011	4:37:06 PM	Helium MFC set to  0.000000
3/21/2011	4:37:06 PM	H2 MFC set to  0.000000
3/21/2011	4:37:06 PM	BCl3 MFC set to  0.000000
3/21/2011	4:37:06 PM	PHl3 MFC set to  0.000000
3/21/2011	4:37:06 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:37:06 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:37:06 PM	Tube furnace set to 0
3/21/2011	4:37:06 PM	Run finished at 4:37 PM
3/21/2011	4:37:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	4:37:10 PM	Recipe started at 4:37 PM
3/21/2011	4:37:10 PM	H2 valve closed
3/21/2011	4:37:10 PM	BCl3 valve closed
3/21/2011	4:37:10 PM	PH3 valve closed
3/21/2011	4:37:10 PM	SiCl4 pre valve closed
3/21/2011	4:37:10 PM	SiCl4 post valve closed
3/21/2011	4:37:10 PM	Main Vac valve closed
3/21/2011	4:37:10 PM	Bypass valve closed
3/21/2011	4:37:10 PM	Bubbler valve closed
3/21/2011	4:37:10 PM	Helium valve opened
3/21/2011	4:37:10 PM	Helium MFC set to  500.000000
3/21/2011	4:37:10 PM	H2 MFC set to  0.000000
3/21/2011	4:37:10 PM	BCl3 MFC set to  0.000000
3/21/2011	4:37:10 PM	PHl3 MFC set to  0.000000
3/21/2011	4:37:10 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:37:10 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:37:10 PM	Tube furnace set to 0
3/21/2011	4:37:10 PM	Helium valve closed
3/21/2011	4:37:10 PM	H2 valve closed
3/21/2011	4:37:10 PM	BCl3 valve closed
3/21/2011	4:37:10 PM	PH3 valve closed
3/21/2011	4:37:10 PM	SiCl4 pre valve closed
3/21/2011	4:37:10 PM	SiCl4 post valve closed
3/21/2011	4:37:10 PM	Main Vac valve closed
3/21/2011	4:37:10 PM	Bypass valve closed
3/21/2011	4:37:10 PM	Bubbler valve closed
3/21/2011	4:37:10 PM	Helium MFC set to  0.000000
3/21/2011	4:37:10 PM	H2 MFC set to  0.000000
3/21/2011	4:37:10 PM	BCl3 MFC set to  0.000000
3/21/2011	4:37:10 PM	PHl3 MFC set to  0.000000
3/21/2011	4:37:10 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:37:10 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:37:10 PM	Tube furnace set to 0
3/21/2011	4:37:11 PM	Run finished at 4:37 PM
3/21/2011	4:37:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	4:45:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	4:45:08 PM	Recipe started at 4:45 PM
3/21/2011	4:45:08 PM	Helium valve closed
3/21/2011	4:45:08 PM	H2 valve closed
3/21/2011	4:45:08 PM	BCl3 valve closed
3/21/2011	4:45:08 PM	PH3 valve closed
3/21/2011	4:45:08 PM	SiCl4 pre valve closed
3/21/2011	4:45:08 PM	SiCl4 post valve closed
3/21/2011	4:45:08 PM	Main Vac valve closed
3/21/2011	4:45:08 PM	Bubbler valve closed
3/21/2011	4:45:08 PM	Bypass valve opened
3/21/2011	4:45:08 PM	Helium MFC set to  0.000000
3/21/2011	4:45:08 PM	H2 MFC set to  0.000000
3/21/2011	4:45:08 PM	BCl3 MFC set to  0.000000
3/21/2011	4:45:08 PM	PHl3 MFC set to  0.000000
3/21/2011	4:45:08 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:45:08 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:45:08 PM	Tube furnace set to 0
3/21/2011	4:45:40 PM	Helium valve closed
3/21/2011	4:45:40 PM	H2 valve closed
3/21/2011	4:45:40 PM	BCl3 valve closed
3/21/2011	4:45:40 PM	PH3 valve closed
3/21/2011	4:45:40 PM	SiCl4 pre valve closed
3/21/2011	4:45:40 PM	SiCl4 post valve closed
3/21/2011	4:45:40 PM	Bubbler valve closed
3/21/2011	4:45:40 PM	Main Vac valve opened
3/21/2011	4:45:40 PM	Bypass valve opened
3/21/2011	4:45:40 PM	Helium MFC set to  0.000000
3/21/2011	4:45:40 PM	H2 MFC set to  0.000000
3/21/2011	4:45:40 PM	BCl3 MFC set to  0.000000
3/21/2011	4:45:40 PM	PHl3 MFC set to  0.000000
3/21/2011	4:45:40 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:45:40 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:45:40 PM	Tube furnace set to 0
3/21/2011	4:45:40 PM	Run finished at 4:45 PM
3/21/2011	4:45:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	4:48:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	4:48:24 PM	Recipe started at 4:48 PM
3/21/2011	4:48:24 PM	H2 valve closed
3/21/2011	4:48:24 PM	BCl3 valve closed
3/21/2011	4:48:24 PM	PH3 valve closed
3/21/2011	4:48:24 PM	SiCl4 pre valve closed
3/21/2011	4:48:24 PM	SiCl4 post valve closed
3/21/2011	4:48:24 PM	Main Vac valve closed
3/21/2011	4:48:24 PM	Bypass valve closed
3/21/2011	4:48:24 PM	Bubbler valve closed
3/21/2011	4:48:24 PM	Helium valve opened
3/21/2011	4:48:24 PM	Helium MFC set to  500.000000
3/21/2011	4:48:24 PM	H2 MFC set to  0.000000
3/21/2011	4:48:24 PM	BCl3 MFC set to  0.000000
3/21/2011	4:48:24 PM	PHl3 MFC set to  0.000000
3/21/2011	4:48:24 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:48:24 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:48:24 PM	Tube furnace set to 0
3/21/2011	4:49:40 PM	Helium valve closed
3/21/2011	4:49:40 PM	H2 valve closed
3/21/2011	4:49:40 PM	BCl3 valve closed
3/21/2011	4:49:40 PM	PH3 valve closed
3/21/2011	4:49:40 PM	SiCl4 pre valve closed
3/21/2011	4:49:40 PM	SiCl4 post valve closed
3/21/2011	4:49:40 PM	Main Vac valve closed
3/21/2011	4:49:40 PM	Bypass valve closed
3/21/2011	4:49:40 PM	Bubbler valve closed
3/21/2011	4:49:40 PM	Helium MFC set to  0.000000
3/21/2011	4:49:40 PM	H2 MFC set to  0.000000
3/21/2011	4:49:40 PM	BCl3 MFC set to  0.000000
3/21/2011	4:49:40 PM	PHl3 MFC set to  0.000000
3/21/2011	4:49:40 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:49:40 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:49:40 PM	Tube furnace set to 0
3/21/2011	4:49:40 PM	Run finished at 4:49 PM
3/21/2011	4:49:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	4:49:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	4:49:46 PM	Recipe started at 4:49 PM
3/21/2011	4:49:46 PM	Helium valve closed
3/21/2011	4:49:46 PM	H2 valve closed
3/21/2011	4:49:46 PM	BCl3 valve closed
3/21/2011	4:49:46 PM	PH3 valve closed
3/21/2011	4:49:46 PM	SiCl4 pre valve closed
3/21/2011	4:49:46 PM	SiCl4 post valve closed
3/21/2011	4:49:46 PM	Main Vac valve closed
3/21/2011	4:49:46 PM	Bubbler valve closed
3/21/2011	4:49:46 PM	Bypass valve opened
3/21/2011	4:49:46 PM	Helium MFC set to  0.000000
3/21/2011	4:49:46 PM	H2 MFC set to  0.000000
3/21/2011	4:49:46 PM	BCl3 MFC set to  0.000000
3/21/2011	4:49:46 PM	PHl3 MFC set to  0.000000
3/21/2011	4:49:46 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:49:46 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:49:46 PM	Tube furnace set to 0
3/21/2011	4:50:08 PM	Helium valve closed
3/21/2011	4:50:08 PM	H2 valve closed
3/21/2011	4:50:08 PM	BCl3 valve closed
3/21/2011	4:50:08 PM	PH3 valve closed
3/21/2011	4:50:08 PM	SiCl4 pre valve closed
3/21/2011	4:50:08 PM	SiCl4 post valve closed
3/21/2011	4:50:08 PM	Bubbler valve closed
3/21/2011	4:50:08 PM	Main Vac valve opened
3/21/2011	4:50:08 PM	Bypass valve opened
3/21/2011	4:50:08 PM	Helium MFC set to  0.000000
3/21/2011	4:50:08 PM	H2 MFC set to  0.000000
3/21/2011	4:50:08 PM	BCl3 MFC set to  0.000000
3/21/2011	4:50:08 PM	PHl3 MFC set to  0.000000
3/21/2011	4:50:08 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:50:08 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:50:08 PM	Tube furnace set to 0
3/21/2011	4:50:08 PM	Run finished at 4:50 PM
3/21/2011	4:50:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	4:50:22 PM	Helium MFC set to  100.000000
3/21/2011	4:50:24 PM	Helium valve opened
3/21/2011	4:51:45 PM	Helium valve closed
3/21/2011	4:51:51 PM	Helium MFC set to  0.000000
3/21/2011	4:52:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	4:52:30 PM	Recipe started at 4:52 PM
3/21/2011	4:52:30 PM	Helium valve closed
3/21/2011	4:52:30 PM	H2 valve closed
3/21/2011	4:52:30 PM	BCl3 valve closed
3/21/2011	4:52:30 PM	PH3 valve closed
3/21/2011	4:52:30 PM	SiCl4 pre valve closed
3/21/2011	4:52:30 PM	SiCl4 post valve closed
3/21/2011	4:52:30 PM	Main Vac valve closed
3/21/2011	4:52:30 PM	Bubbler valve closed
3/21/2011	4:52:30 PM	Bypass valve opened
3/21/2011	4:52:30 PM	Helium MFC set to  0.000000
3/21/2011	4:52:30 PM	H2 MFC set to  0.000000
3/21/2011	4:52:30 PM	BCl3 MFC set to  0.000000
3/21/2011	4:52:30 PM	PHl3 MFC set to  0.000000
3/21/2011	4:52:30 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:52:30 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:52:30 PM	Tube furnace set to 0
3/21/2011	4:52:31 PM	Helium valve closed
3/21/2011	4:52:31 PM	H2 valve closed
3/21/2011	4:52:31 PM	BCl3 valve closed
3/21/2011	4:52:31 PM	PH3 valve closed
3/21/2011	4:52:31 PM	SiCl4 pre valve closed
3/21/2011	4:52:31 PM	SiCl4 post valve closed
3/21/2011	4:52:31 PM	Bubbler valve closed
3/21/2011	4:52:31 PM	Main Vac valve opened
3/21/2011	4:52:31 PM	Bypass valve opened
3/21/2011	4:52:31 PM	Helium MFC set to  0.000000
3/21/2011	4:52:31 PM	H2 MFC set to  0.000000
3/21/2011	4:52:31 PM	BCl3 MFC set to  0.000000
3/21/2011	4:52:31 PM	PHl3 MFC set to  0.000000
3/21/2011	4:52:31 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:52:31 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:52:31 PM	Tube furnace set to 0
3/21/2011	4:53:31 PM	H2 valve closed
3/21/2011	4:53:31 PM	BCl3 valve closed
3/21/2011	4:53:31 PM	PH3 valve closed
3/21/2011	4:53:31 PM	SiCl4 pre valve closed
3/21/2011	4:53:31 PM	SiCl4 post valve closed
3/21/2011	4:53:31 PM	Bubbler valve closed
3/21/2011	4:53:31 PM	Helium valve opened
3/21/2011	4:53:31 PM	Main Vac valve opened
3/21/2011	4:53:31 PM	Bypass valve opened
3/21/2011	4:53:31 PM	Helium MFC set to  100.000000
3/21/2011	4:53:31 PM	H2 MFC set to  0.000000
3/21/2011	4:53:31 PM	BCl3 MFC set to  0.000000
3/21/2011	4:53:31 PM	PHl3 MFC set to  0.000000
3/21/2011	4:53:31 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:53:31 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:53:31 PM	Tube furnace set to 0
3/21/2011	4:54:31 PM	Helium valve closed
3/21/2011	4:54:31 PM	H2 valve closed
3/21/2011	4:54:31 PM	BCl3 valve closed
3/21/2011	4:54:31 PM	PH3 valve closed
3/21/2011	4:54:31 PM	SiCl4 pre valve closed
3/21/2011	4:54:31 PM	SiCl4 post valve closed
3/21/2011	4:54:31 PM	Bubbler valve closed
3/21/2011	4:54:31 PM	Main Vac valve opened
3/21/2011	4:54:31 PM	Bypass valve opened
3/21/2011	4:54:31 PM	Helium MFC set to  0.000000
3/21/2011	4:54:31 PM	H2 MFC set to  0.000000
3/21/2011	4:54:31 PM	BCl3 MFC set to  0.000000
3/21/2011	4:54:31 PM	PHl3 MFC set to  0.000000
3/21/2011	4:54:31 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:54:31 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:54:31 PM	Tube furnace set to 0
3/21/2011	4:55:31 PM	H2 valve closed
3/21/2011	4:55:31 PM	BCl3 valve closed
3/21/2011	4:55:31 PM	PH3 valve closed
3/21/2011	4:55:31 PM	SiCl4 pre valve closed
3/21/2011	4:55:31 PM	SiCl4 post valve closed
3/21/2011	4:55:31 PM	Bubbler valve closed
3/21/2011	4:55:31 PM	Helium valve opened
3/21/2011	4:55:31 PM	Main Vac valve opened
3/21/2011	4:55:31 PM	Bypass valve opened
3/21/2011	4:55:31 PM	Helium MFC set to  100.000000
3/21/2011	4:55:31 PM	H2 MFC set to  0.000000
3/21/2011	4:55:31 PM	BCl3 MFC set to  0.000000
3/21/2011	4:55:31 PM	PHl3 MFC set to  0.000000
3/21/2011	4:55:31 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:55:31 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:55:31 PM	Tube furnace set to 0
3/21/2011	4:56:31 PM	Helium valve closed
3/21/2011	4:56:31 PM	H2 valve closed
3/21/2011	4:56:31 PM	BCl3 valve closed
3/21/2011	4:56:31 PM	PH3 valve closed
3/21/2011	4:56:31 PM	SiCl4 pre valve closed
3/21/2011	4:56:31 PM	SiCl4 post valve closed
3/21/2011	4:56:31 PM	Bubbler valve closed
3/21/2011	4:56:31 PM	Main Vac valve opened
3/21/2011	4:56:31 PM	Bypass valve opened
3/21/2011	4:56:31 PM	Helium MFC set to  0.000000
3/21/2011	4:56:31 PM	H2 MFC set to  0.000000
3/21/2011	4:56:31 PM	BCl3 MFC set to  0.000000
3/21/2011	4:56:31 PM	PHl3 MFC set to  0.000000
3/21/2011	4:56:31 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:56:31 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:56:32 PM	Tube furnace set to 0
3/21/2011	4:57:32 PM	H2 valve closed
3/21/2011	4:57:32 PM	BCl3 valve closed
3/21/2011	4:57:32 PM	PH3 valve closed
3/21/2011	4:57:32 PM	SiCl4 pre valve closed
3/21/2011	4:57:32 PM	SiCl4 post valve closed
3/21/2011	4:57:32 PM	Bubbler valve closed
3/21/2011	4:57:32 PM	Helium valve opened
3/21/2011	4:57:32 PM	Main Vac valve opened
3/21/2011	4:57:32 PM	Bypass valve opened
3/21/2011	4:57:32 PM	Helium MFC set to  100.000000
3/21/2011	4:57:32 PM	H2 MFC set to  0.000000
3/21/2011	4:57:32 PM	BCl3 MFC set to  0.000000
3/21/2011	4:57:32 PM	PHl3 MFC set to  0.000000
3/21/2011	4:57:32 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:57:32 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:57:32 PM	Tube furnace set to 0
3/21/2011	4:58:32 PM	Helium valve closed
3/21/2011	4:58:32 PM	H2 valve closed
3/21/2011	4:58:32 PM	BCl3 valve closed
3/21/2011	4:58:32 PM	PH3 valve closed
3/21/2011	4:58:32 PM	SiCl4 pre valve closed
3/21/2011	4:58:32 PM	SiCl4 post valve closed
3/21/2011	4:58:32 PM	Bubbler valve closed
3/21/2011	4:58:32 PM	Main Vac valve opened
3/21/2011	4:58:32 PM	Bypass valve opened
3/21/2011	4:58:32 PM	Helium MFC set to  0.000000
3/21/2011	4:58:32 PM	H2 MFC set to  0.000000
3/21/2011	4:58:32 PM	BCl3 MFC set to  0.000000
3/21/2011	4:58:32 PM	PHl3 MFC set to  0.000000
3/21/2011	4:58:32 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:58:32 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:58:32 PM	Tube furnace set to 0
3/21/2011	4:59:32 PM	H2 valve closed
3/21/2011	4:59:32 PM	BCl3 valve closed
3/21/2011	4:59:32 PM	PH3 valve closed
3/21/2011	4:59:32 PM	SiCl4 pre valve closed
3/21/2011	4:59:32 PM	SiCl4 post valve closed
3/21/2011	4:59:32 PM	Bubbler valve closed
3/21/2011	4:59:32 PM	Helium valve opened
3/21/2011	4:59:32 PM	Main Vac valve opened
3/21/2011	4:59:32 PM	Bypass valve opened
3/21/2011	4:59:32 PM	Helium MFC set to  100.000000
3/21/2011	4:59:32 PM	H2 MFC set to  0.000000
3/21/2011	4:59:32 PM	BCl3 MFC set to  0.000000
3/21/2011	4:59:32 PM	PHl3 MFC set to  0.000000
3/21/2011	4:59:32 PM	SiCl4 MFC set to  0.000000
3/21/2011	4:59:32 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	4:59:32 PM	Tube furnace set to 0
3/21/2011	5:00:32 PM	Helium valve closed
3/21/2011	5:00:32 PM	H2 valve closed
3/21/2011	5:00:32 PM	BCl3 valve closed
3/21/2011	5:00:32 PM	PH3 valve closed
3/21/2011	5:00:32 PM	SiCl4 pre valve closed
3/21/2011	5:00:32 PM	SiCl4 post valve closed
3/21/2011	5:00:32 PM	Bubbler valve closed
3/21/2011	5:00:32 PM	Main Vac valve opened
3/21/2011	5:00:32 PM	Bypass valve opened
3/21/2011	5:00:32 PM	Helium MFC set to  0.000000
3/21/2011	5:00:32 PM	H2 MFC set to  0.000000
3/21/2011	5:00:32 PM	BCl3 MFC set to  0.000000
3/21/2011	5:00:32 PM	PHl3 MFC set to  0.000000
3/21/2011	5:00:32 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:00:32 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:00:32 PM	Tube furnace set to 0
3/21/2011	5:01:00 PM	Run aborted at 5:01 PM
3/21/2011	5:01:00 PM	Helium valve closed
3/21/2011	5:01:00 PM	H2 valve closed
3/21/2011	5:01:00 PM	BCl3 valve closed
3/21/2011	5:01:00 PM	PH3 valve closed
3/21/2011	5:01:00 PM	SiCl4 pre valve closed
3/21/2011	5:01:00 PM	SiCl4 post valve closed
3/21/2011	5:01:00 PM	Bypass valve closed
3/21/2011	5:01:00 PM	Main Vac valve closed
3/21/2011	5:01:00 PM	Bubbler valve closed
3/21/2011	5:01:00 PM	Helium MFC set to  0.000000
3/21/2011	5:01:00 PM	H2 MFC set to  0.000000
3/21/2011	5:01:00 PM	BCl3 MFC set to  0.000000
3/21/2011	5:01:00 PM	PHl3 MFC set to  0.000000
3/21/2011	5:01:00 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:01:01 PM	Tube furnace set to 0
3/21/2011	5:01:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	5:01:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	5:01:14 PM	Recipe started at 5:01 PM
3/21/2011	5:01:14 PM	Helium valve closed
3/21/2011	5:01:14 PM	H2 valve closed
3/21/2011	5:01:14 PM	BCl3 valve closed
3/21/2011	5:01:14 PM	PH3 valve closed
3/21/2011	5:01:14 PM	SiCl4 pre valve closed
3/21/2011	5:01:14 PM	SiCl4 post valve closed
3/21/2011	5:01:14 PM	Main Vac valve closed
3/21/2011	5:01:14 PM	Bubbler valve closed
3/21/2011	5:01:14 PM	Bypass valve opened
3/21/2011	5:01:14 PM	Helium MFC set to  0.000000
3/21/2011	5:01:14 PM	H2 MFC set to  0.000000
3/21/2011	5:01:14 PM	BCl3 MFC set to  0.000000
3/21/2011	5:01:14 PM	PHl3 MFC set to  0.000000
3/21/2011	5:01:14 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:01:14 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:01:15 PM	Tube furnace set to 0
3/21/2011	5:01:15 PM	Helium valve closed
3/21/2011	5:01:15 PM	H2 valve closed
3/21/2011	5:01:15 PM	BCl3 valve closed
3/21/2011	5:01:15 PM	PH3 valve closed
3/21/2011	5:01:15 PM	SiCl4 pre valve closed
3/21/2011	5:01:15 PM	SiCl4 post valve closed
3/21/2011	5:01:15 PM	Bubbler valve closed
3/21/2011	5:01:15 PM	Main Vac valve opened
3/21/2011	5:01:15 PM	Bypass valve opened
3/21/2011	5:01:15 PM	Helium MFC set to  0.000000
3/21/2011	5:01:15 PM	H2 MFC set to  0.000000
3/21/2011	5:01:15 PM	BCl3 MFC set to  0.000000
3/21/2011	5:01:15 PM	PHl3 MFC set to  0.000000
3/21/2011	5:01:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:01:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:01:15 PM	Tube furnace set to 0
3/21/2011	5:02:15 PM	H2 valve closed
3/21/2011	5:02:15 PM	BCl3 valve closed
3/21/2011	5:02:15 PM	PH3 valve closed
3/21/2011	5:02:15 PM	SiCl4 pre valve closed
3/21/2011	5:02:15 PM	SiCl4 post valve closed
3/21/2011	5:02:15 PM	Bubbler valve closed
3/21/2011	5:02:15 PM	Helium valve opened
3/21/2011	5:02:15 PM	Main Vac valve opened
3/21/2011	5:02:15 PM	Bypass valve opened
3/21/2011	5:02:15 PM	Helium MFC set to  100.000000
3/21/2011	5:02:15 PM	H2 MFC set to  0.000000
3/21/2011	5:02:15 PM	BCl3 MFC set to  0.000000
3/21/2011	5:02:15 PM	PHl3 MFC set to  0.000000
3/21/2011	5:02:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:02:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:02:15 PM	Tube furnace set to 0
3/21/2011	5:03:15 PM	Helium valve closed
3/21/2011	5:03:15 PM	H2 valve closed
3/21/2011	5:03:15 PM	BCl3 valve closed
3/21/2011	5:03:15 PM	PH3 valve closed
3/21/2011	5:03:15 PM	SiCl4 pre valve closed
3/21/2011	5:03:15 PM	SiCl4 post valve closed
3/21/2011	5:03:15 PM	Bubbler valve closed
3/21/2011	5:03:15 PM	Main Vac valve opened
3/21/2011	5:03:15 PM	Bypass valve opened
3/21/2011	5:03:15 PM	Helium MFC set to  0.000000
3/21/2011	5:03:15 PM	H2 MFC set to  0.000000
3/21/2011	5:03:15 PM	BCl3 MFC set to  0.000000
3/21/2011	5:03:15 PM	PHl3 MFC set to  0.000000
3/21/2011	5:03:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:03:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:03:15 PM	Tube furnace set to 0
3/21/2011	5:04:15 PM	H2 valve closed
3/21/2011	5:04:15 PM	BCl3 valve closed
3/21/2011	5:04:15 PM	PH3 valve closed
3/21/2011	5:04:15 PM	SiCl4 pre valve closed
3/21/2011	5:04:15 PM	SiCl4 post valve closed
3/21/2011	5:04:15 PM	Bubbler valve closed
3/21/2011	5:04:15 PM	Helium valve opened
3/21/2011	5:04:15 PM	Main Vac valve opened
3/21/2011	5:04:15 PM	Bypass valve opened
3/21/2011	5:04:15 PM	Helium MFC set to  100.000000
3/21/2011	5:04:15 PM	H2 MFC set to  0.000000
3/21/2011	5:04:15 PM	BCl3 MFC set to  0.000000
3/21/2011	5:04:15 PM	PHl3 MFC set to  0.000000
3/21/2011	5:04:15 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:04:15 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:04:16 PM	Tube furnace set to 0
3/21/2011	5:05:16 PM	Helium valve closed
3/21/2011	5:05:16 PM	H2 valve closed
3/21/2011	5:05:16 PM	BCl3 valve closed
3/21/2011	5:05:16 PM	PH3 valve closed
3/21/2011	5:05:16 PM	SiCl4 pre valve closed
3/21/2011	5:05:16 PM	SiCl4 post valve closed
3/21/2011	5:05:16 PM	Bubbler valve closed
3/21/2011	5:05:16 PM	Main Vac valve opened
3/21/2011	5:05:16 PM	Bypass valve opened
3/21/2011	5:05:16 PM	Helium MFC set to  0.000000
3/21/2011	5:05:16 PM	H2 MFC set to  0.000000
3/21/2011	5:05:16 PM	BCl3 MFC set to  0.000000
3/21/2011	5:05:16 PM	PHl3 MFC set to  0.000000
3/21/2011	5:05:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:05:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:05:16 PM	Tube furnace set to 0
3/21/2011	5:06:16 PM	H2 valve closed
3/21/2011	5:06:16 PM	BCl3 valve closed
3/21/2011	5:06:16 PM	PH3 valve closed
3/21/2011	5:06:16 PM	SiCl4 pre valve closed
3/21/2011	5:06:16 PM	SiCl4 post valve closed
3/21/2011	5:06:16 PM	Bubbler valve closed
3/21/2011	5:06:16 PM	Helium valve opened
3/21/2011	5:06:16 PM	Main Vac valve opened
3/21/2011	5:06:16 PM	Bypass valve opened
3/21/2011	5:06:16 PM	Helium MFC set to  100.000000
3/21/2011	5:06:16 PM	H2 MFC set to  0.000000
3/21/2011	5:06:16 PM	BCl3 MFC set to  0.000000
3/21/2011	5:06:16 PM	PHl3 MFC set to  0.000000
3/21/2011	5:06:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:06:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:06:16 PM	Tube furnace set to 0
3/21/2011	5:07:16 PM	Helium valve closed
3/21/2011	5:07:16 PM	H2 valve closed
3/21/2011	5:07:16 PM	BCl3 valve closed
3/21/2011	5:07:16 PM	PH3 valve closed
3/21/2011	5:07:16 PM	SiCl4 pre valve closed
3/21/2011	5:07:16 PM	SiCl4 post valve closed
3/21/2011	5:07:16 PM	Bubbler valve closed
3/21/2011	5:07:16 PM	Main Vac valve opened
3/21/2011	5:07:16 PM	Bypass valve opened
3/21/2011	5:07:16 PM	Helium MFC set to  0.000000
3/21/2011	5:07:16 PM	H2 MFC set to  0.000000
3/21/2011	5:07:16 PM	BCl3 MFC set to  0.000000
3/21/2011	5:07:16 PM	PHl3 MFC set to  0.000000
3/21/2011	5:07:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:07:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:07:16 PM	Tube furnace set to 0
3/21/2011	5:08:16 PM	H2 valve closed
3/21/2011	5:08:16 PM	BCl3 valve closed
3/21/2011	5:08:16 PM	PH3 valve closed
3/21/2011	5:08:16 PM	SiCl4 pre valve closed
3/21/2011	5:08:16 PM	SiCl4 post valve closed
3/21/2011	5:08:16 PM	Bubbler valve closed
3/21/2011	5:08:16 PM	Helium valve opened
3/21/2011	5:08:16 PM	Main Vac valve opened
3/21/2011	5:08:16 PM	Bypass valve opened
3/21/2011	5:08:16 PM	Helium MFC set to  100.000000
3/21/2011	5:08:16 PM	H2 MFC set to  0.000000
3/21/2011	5:08:16 PM	BCl3 MFC set to  0.000000
3/21/2011	5:08:16 PM	PHl3 MFC set to  0.000000
3/21/2011	5:08:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:08:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:08:16 PM	Tube furnace set to 0
3/21/2011	5:09:16 PM	Helium valve closed
3/21/2011	5:09:16 PM	H2 valve closed
3/21/2011	5:09:16 PM	BCl3 valve closed
3/21/2011	5:09:16 PM	PH3 valve closed
3/21/2011	5:09:16 PM	SiCl4 pre valve closed
3/21/2011	5:09:16 PM	SiCl4 post valve closed
3/21/2011	5:09:16 PM	Bubbler valve closed
3/21/2011	5:09:16 PM	Main Vac valve opened
3/21/2011	5:09:16 PM	Bypass valve opened
3/21/2011	5:09:16 PM	Helium MFC set to  0.000000
3/21/2011	5:09:16 PM	H2 MFC set to  0.000000
3/21/2011	5:09:16 PM	BCl3 MFC set to  0.000000
3/21/2011	5:09:16 PM	PHl3 MFC set to  0.000000
3/21/2011	5:09:16 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:09:16 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:09:17 PM	Tube furnace set to 0
3/21/2011	5:10:17 PM	H2 valve closed
3/21/2011	5:10:17 PM	BCl3 valve closed
3/21/2011	5:10:17 PM	PH3 valve closed
3/21/2011	5:10:17 PM	SiCl4 pre valve closed
3/21/2011	5:10:17 PM	SiCl4 post valve closed
3/21/2011	5:10:17 PM	Bubbler valve closed
3/21/2011	5:10:17 PM	Helium valve opened
3/21/2011	5:10:17 PM	Main Vac valve opened
3/21/2011	5:10:17 PM	Bypass valve opened
3/21/2011	5:10:17 PM	Helium MFC set to  100.000000
3/21/2011	5:10:17 PM	H2 MFC set to  0.000000
3/21/2011	5:10:17 PM	BCl3 MFC set to  0.000000
3/21/2011	5:10:17 PM	PHl3 MFC set to  0.000000
3/21/2011	5:10:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:10:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:10:17 PM	Tube furnace set to 0
3/21/2011	5:11:17 PM	Helium valve closed
3/21/2011	5:11:17 PM	H2 valve closed
3/21/2011	5:11:17 PM	BCl3 valve closed
3/21/2011	5:11:17 PM	PH3 valve closed
3/21/2011	5:11:17 PM	SiCl4 pre valve closed
3/21/2011	5:11:17 PM	SiCl4 post valve closed
3/21/2011	5:11:17 PM	Bubbler valve closed
3/21/2011	5:11:17 PM	Main Vac valve opened
3/21/2011	5:11:17 PM	Bypass valve opened
3/21/2011	5:11:17 PM	Helium MFC set to  0.000000
3/21/2011	5:11:17 PM	H2 MFC set to  0.000000
3/21/2011	5:11:17 PM	BCl3 MFC set to  0.000000
3/21/2011	5:11:17 PM	PHl3 MFC set to  0.000000
3/21/2011	5:11:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:11:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:11:17 PM	Tube furnace set to 0
3/21/2011	5:12:17 PM	H2 valve closed
3/21/2011	5:12:17 PM	BCl3 valve closed
3/21/2011	5:12:17 PM	PH3 valve closed
3/21/2011	5:12:17 PM	SiCl4 pre valve closed
3/21/2011	5:12:17 PM	SiCl4 post valve closed
3/21/2011	5:12:17 PM	Bubbler valve closed
3/21/2011	5:12:17 PM	Helium valve opened
3/21/2011	5:12:17 PM	Main Vac valve opened
3/21/2011	5:12:17 PM	Bypass valve opened
3/21/2011	5:12:17 PM	Helium MFC set to  100.000000
3/21/2011	5:12:17 PM	H2 MFC set to  0.000000
3/21/2011	5:12:17 PM	BCl3 MFC set to  0.000000
3/21/2011	5:12:17 PM	PHl3 MFC set to  0.000000
3/21/2011	5:12:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:12:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:12:17 PM	Tube furnace set to 0
3/21/2011	5:13:17 PM	Helium valve closed
3/21/2011	5:13:17 PM	H2 valve closed
3/21/2011	5:13:17 PM	BCl3 valve closed
3/21/2011	5:13:17 PM	PH3 valve closed
3/21/2011	5:13:17 PM	SiCl4 pre valve closed
3/21/2011	5:13:17 PM	SiCl4 post valve closed
3/21/2011	5:13:17 PM	Bubbler valve closed
3/21/2011	5:13:17 PM	Main Vac valve opened
3/21/2011	5:13:17 PM	Bypass valve opened
3/21/2011	5:13:17 PM	Helium MFC set to  0.000000
3/21/2011	5:13:17 PM	H2 MFC set to  0.000000
3/21/2011	5:13:17 PM	BCl3 MFC set to  0.000000
3/21/2011	5:13:17 PM	PHl3 MFC set to  0.000000
3/21/2011	5:13:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:13:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:13:17 PM	Tube furnace set to 0
3/21/2011	5:14:17 PM	H2 valve closed
3/21/2011	5:14:17 PM	BCl3 valve closed
3/21/2011	5:14:17 PM	PH3 valve closed
3/21/2011	5:14:17 PM	SiCl4 pre valve closed
3/21/2011	5:14:17 PM	SiCl4 post valve closed
3/21/2011	5:14:17 PM	Bubbler valve closed
3/21/2011	5:14:17 PM	Helium valve opened
3/21/2011	5:14:17 PM	Main Vac valve opened
3/21/2011	5:14:17 PM	Bypass valve opened
3/21/2011	5:14:17 PM	Helium MFC set to  100.000000
3/21/2011	5:14:17 PM	H2 MFC set to  0.000000
3/21/2011	5:14:17 PM	BCl3 MFC set to  0.000000
3/21/2011	5:14:17 PM	PHl3 MFC set to  0.000000
3/21/2011	5:14:17 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:14:17 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:14:18 PM	Tube furnace set to 0
3/21/2011	5:15:18 PM	Helium valve closed
3/21/2011	5:15:18 PM	H2 valve closed
3/21/2011	5:15:18 PM	BCl3 valve closed
3/21/2011	5:15:18 PM	PH3 valve closed
3/21/2011	5:15:18 PM	SiCl4 pre valve closed
3/21/2011	5:15:18 PM	SiCl4 post valve closed
3/21/2011	5:15:18 PM	Bubbler valve closed
3/21/2011	5:15:18 PM	Main Vac valve opened
3/21/2011	5:15:18 PM	Bypass valve opened
3/21/2011	5:15:18 PM	Helium MFC set to  0.000000
3/21/2011	5:15:18 PM	H2 MFC set to  0.000000
3/21/2011	5:15:18 PM	BCl3 MFC set to  0.000000
3/21/2011	5:15:18 PM	PHl3 MFC set to  0.000000
3/21/2011	5:15:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:15:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:15:18 PM	Tube furnace set to 0
3/21/2011	5:16:18 PM	H2 valve closed
3/21/2011	5:16:18 PM	BCl3 valve closed
3/21/2011	5:16:18 PM	PH3 valve closed
3/21/2011	5:16:18 PM	SiCl4 pre valve closed
3/21/2011	5:16:18 PM	SiCl4 post valve closed
3/21/2011	5:16:18 PM	Bubbler valve closed
3/21/2011	5:16:18 PM	Helium valve opened
3/21/2011	5:16:18 PM	Main Vac valve opened
3/21/2011	5:16:18 PM	Bypass valve opened
3/21/2011	5:16:18 PM	Helium MFC set to  100.000000
3/21/2011	5:16:18 PM	H2 MFC set to  0.000000
3/21/2011	5:16:18 PM	BCl3 MFC set to  0.000000
3/21/2011	5:16:18 PM	PHl3 MFC set to  0.000000
3/21/2011	5:16:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:16:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:16:18 PM	Tube furnace set to 0
3/21/2011	5:17:18 PM	Helium valve closed
3/21/2011	5:17:18 PM	H2 valve closed
3/21/2011	5:17:18 PM	BCl3 valve closed
3/21/2011	5:17:18 PM	PH3 valve closed
3/21/2011	5:17:18 PM	SiCl4 pre valve closed
3/21/2011	5:17:18 PM	SiCl4 post valve closed
3/21/2011	5:17:18 PM	Bubbler valve closed
3/21/2011	5:17:18 PM	Main Vac valve opened
3/21/2011	5:17:18 PM	Bypass valve opened
3/21/2011	5:17:18 PM	Helium MFC set to  0.000000
3/21/2011	5:17:18 PM	H2 MFC set to  0.000000
3/21/2011	5:17:18 PM	BCl3 MFC set to  0.000000
3/21/2011	5:17:18 PM	PHl3 MFC set to  0.000000
3/21/2011	5:17:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:17:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:17:18 PM	Tube furnace set to 0
3/21/2011	5:18:18 PM	H2 valve closed
3/21/2011	5:18:18 PM	BCl3 valve closed
3/21/2011	5:18:18 PM	PH3 valve closed
3/21/2011	5:18:18 PM	SiCl4 pre valve closed
3/21/2011	5:18:18 PM	SiCl4 post valve closed
3/21/2011	5:18:18 PM	Bubbler valve closed
3/21/2011	5:18:18 PM	Helium valve opened
3/21/2011	5:18:18 PM	Main Vac valve opened
3/21/2011	5:18:18 PM	Bypass valve opened
3/21/2011	5:18:18 PM	Helium MFC set to  100.000000
3/21/2011	5:18:18 PM	H2 MFC set to  0.000000
3/21/2011	5:18:18 PM	BCl3 MFC set to  0.000000
3/21/2011	5:18:18 PM	PHl3 MFC set to  0.000000
3/21/2011	5:18:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:18:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:18:18 PM	Tube furnace set to 0
3/21/2011	5:19:18 PM	Helium valve closed
3/21/2011	5:19:18 PM	H2 valve closed
3/21/2011	5:19:18 PM	BCl3 valve closed
3/21/2011	5:19:18 PM	PH3 valve closed
3/21/2011	5:19:18 PM	SiCl4 pre valve closed
3/21/2011	5:19:18 PM	SiCl4 post valve closed
3/21/2011	5:19:18 PM	Bubbler valve closed
3/21/2011	5:19:18 PM	Main Vac valve opened
3/21/2011	5:19:18 PM	Bypass valve opened
3/21/2011	5:19:18 PM	Helium MFC set to  0.000000
3/21/2011	5:19:18 PM	H2 MFC set to  0.000000
3/21/2011	5:19:18 PM	BCl3 MFC set to  0.000000
3/21/2011	5:19:18 PM	PHl3 MFC set to  0.000000
3/21/2011	5:19:18 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:19:18 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:19:19 PM	Tube furnace set to 0
3/21/2011	5:20:19 PM	H2 valve closed
3/21/2011	5:20:19 PM	BCl3 valve closed
3/21/2011	5:20:19 PM	PH3 valve closed
3/21/2011	5:20:19 PM	SiCl4 pre valve closed
3/21/2011	5:20:19 PM	SiCl4 post valve closed
3/21/2011	5:20:19 PM	Bubbler valve closed
3/21/2011	5:20:19 PM	Helium valve opened
3/21/2011	5:20:19 PM	Main Vac valve opened
3/21/2011	5:20:19 PM	Bypass valve opened
3/21/2011	5:20:19 PM	Helium MFC set to  100.000000
3/21/2011	5:20:19 PM	H2 MFC set to  0.000000
3/21/2011	5:20:19 PM	BCl3 MFC set to  0.000000
3/21/2011	5:20:19 PM	PHl3 MFC set to  0.000000
3/21/2011	5:20:19 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:20:19 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:20:19 PM	Tube furnace set to 0
3/21/2011	5:21:19 PM	Helium valve closed
3/21/2011	5:21:19 PM	H2 valve closed
3/21/2011	5:21:19 PM	BCl3 valve closed
3/21/2011	5:21:19 PM	PH3 valve closed
3/21/2011	5:21:19 PM	SiCl4 pre valve closed
3/21/2011	5:21:19 PM	SiCl4 post valve closed
3/21/2011	5:21:19 PM	Bubbler valve closed
3/21/2011	5:21:19 PM	Main Vac valve opened
3/21/2011	5:21:19 PM	Bypass valve opened
3/21/2011	5:21:19 PM	Helium MFC set to  0.000000
3/21/2011	5:21:19 PM	H2 MFC set to  0.000000
3/21/2011	5:21:19 PM	BCl3 MFC set to  0.000000
3/21/2011	5:21:19 PM	PHl3 MFC set to  0.000000
3/21/2011	5:21:19 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:21:19 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:21:19 PM	Tube furnace set to 0
3/21/2011	5:21:20 PM	Run finished at 5:21 PM
3/21/2011	5:21:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/21/2011	5:26:44 PM	Helium MFC set to  100.000000
3/21/2011	5:26:45 PM	Helium valve opened
3/21/2011	5:27:13 PM	Helium MFC set to  500.000000
3/21/2011	5:30:58 PM	Helium MFC set to  100.000000
3/21/2011	5:31:00 PM	Helium valve closed
3/21/2011	5:31:50 PM	Helium valve opened
3/21/2011	5:31:53 PM	Helium MFC set to  500.000000
3/21/2011	5:34:09 PM	Helium MFC set to  100.000000
3/21/2011	5:34:14 PM	Helium valve closed
3/21/2011	5:35:02 PM	Helium valve opened
3/21/2011	5:35:07 PM	Helium MFC set to  500.000000
3/21/2011	5:44:41 PM	Helium MFC set to  100.000000
3/21/2011	5:44:43 PM	Helium valve closed
3/21/2011	5:45:29 PM	Recipe started at 5:45 PM
3/21/2011	5:45:29 PM	Helium valve closed
3/21/2011	5:45:29 PM	BCl3 valve closed
3/21/2011	5:45:29 PM	PH3 valve closed
3/21/2011	5:45:29 PM	SiCl4 pre valve closed
3/21/2011	5:45:29 PM	SiCl4 post valve closed
3/21/2011	5:45:29 PM	Main Vac valve closed
3/21/2011	5:45:29 PM	Bypass valve closed
3/21/2011	5:45:29 PM	Bubbler valve closed
3/21/2011	5:45:29 PM	H2 valve opened
3/21/2011	5:45:29 PM	Helium MFC set to  0.000000
3/21/2011	5:45:29 PM	H2 MFC set to  500.000000
3/21/2011	5:45:29 PM	BCl3 MFC set to  0.000000
3/21/2011	5:45:29 PM	PHl3 MFC set to  0.000000
3/21/2011	5:45:29 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:45:29 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:45:30 PM	Tube furnace set to 1000
3/21/2011	5:46:47 PM	Helium valve closed
3/21/2011	5:46:47 PM	BCl3 valve closed
3/21/2011	5:46:47 PM	PH3 valve closed
3/21/2011	5:46:47 PM	SiCl4 pre valve closed
3/21/2011	5:46:47 PM	SiCl4 post valve closed
3/21/2011	5:46:47 PM	Main Vac valve closed
3/21/2011	5:46:47 PM	Bypass valve closed
3/21/2011	5:46:47 PM	H2 valve opened
3/21/2011	5:46:47 PM	Bubbler valve opened
3/21/2011	5:46:47 PM	Helium MFC set to  0.000000
3/21/2011	5:46:47 PM	H2 MFC set to  500.000000
3/21/2011	5:46:47 PM	BCl3 MFC set to  0.000000
3/21/2011	5:46:47 PM	PHl3 MFC set to  0.000000
3/21/2011	5:46:47 PM	SiCl4 MFC set to  0.000000
3/21/2011	5:46:47 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	5:46:48 PM	Tube furnace set to 1000
3/21/2011	6:06:48 PM	Helium valve closed
3/21/2011	6:06:48 PM	PH3 valve closed
3/21/2011	6:06:48 PM	Main Vac valve closed
3/21/2011	6:06:48 PM	Bypass valve closed
3/21/2011	6:06:48 PM	H2 valve opened
3/21/2011	6:06:48 PM	BCl3 valve opened
3/21/2011	6:06:48 PM	SiCl4 pre valve opened
3/21/2011	6:06:48 PM	SiCl4 post valve opened
3/21/2011	6:06:48 PM	Bubbler valve opened
3/21/2011	6:06:48 PM	Helium MFC set to  0.000000
3/21/2011	6:06:48 PM	H2 MFC set to  500.000000
3/21/2011	6:06:48 PM	BCl3 MFC set to  2.000000
3/21/2011	6:06:48 PM	PHl3 MFC set to  0.000000
3/21/2011	6:06:48 PM	SiCl4 MFC set to  50.000000
3/21/2011	6:06:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	6:06:48 PM	Tube furnace set to 1000
3/21/2011	6:18:48 PM	Helium valve closed
3/21/2011	6:18:48 PM	BCl3 valve closed
3/21/2011	6:18:48 PM	PH3 valve closed
3/21/2011	6:18:48 PM	SiCl4 pre valve closed
3/21/2011	6:18:48 PM	SiCl4 post valve closed
3/21/2011	6:18:48 PM	Main Vac valve closed
3/21/2011	6:18:48 PM	Bypass valve closed
3/21/2011	6:18:48 PM	H2 valve opened
3/21/2011	6:18:48 PM	Bubbler valve opened
3/21/2011	6:18:48 PM	Helium MFC set to  0.000000
3/21/2011	6:18:48 PM	H2 MFC set to  500.000000
3/21/2011	6:18:48 PM	BCl3 MFC set to  0.000000
3/21/2011	6:18:48 PM	PHl3 MFC set to  0.000000
3/21/2011	6:18:48 PM	SiCl4 MFC set to  0.000000
3/21/2011	6:18:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	6:18:48 PM	Tube furnace set to 750
3/21/2011	6:38:48 PM	H2 valve closed
3/21/2011	6:38:48 PM	BCl3 valve closed
3/21/2011	6:38:48 PM	PH3 valve closed
3/21/2011	6:38:48 PM	SiCl4 pre valve closed
3/21/2011	6:38:48 PM	SiCl4 post valve closed
3/21/2011	6:38:48 PM	Main Vac valve closed
3/21/2011	6:38:48 PM	Bypass valve closed
3/21/2011	6:38:48 PM	Helium valve opened
3/21/2011	6:38:48 PM	Bubbler valve opened
3/21/2011	6:38:48 PM	Helium MFC set to  500.000000
3/21/2011	6:38:48 PM	H2 MFC set to  0.000000
3/21/2011	6:38:48 PM	BCl3 MFC set to  0.000000
3/21/2011	6:38:48 PM	PHl3 MFC set to  0.000000
3/21/2011	6:38:48 PM	SiCl4 MFC set to  0.000000
3/21/2011	6:38:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	6:38:48 PM	Tube furnace set to 0
3/21/2011	6:58:48 PM	Helium valve closed
3/21/2011	6:58:48 PM	H2 valve closed
3/21/2011	6:58:48 PM	BCl3 valve closed
3/21/2011	6:58:48 PM	PH3 valve closed
3/21/2011	6:58:48 PM	SiCl4 pre valve closed
3/21/2011	6:58:48 PM	SiCl4 post valve closed
3/21/2011	6:58:48 PM	Main Vac valve closed
3/21/2011	6:58:48 PM	Bypass valve closed
3/21/2011	6:58:48 PM	Bubbler valve closed
3/21/2011	6:58:48 PM	Helium MFC set to  0.000000
3/21/2011	6:58:48 PM	H2 MFC set to  0.000000
3/21/2011	6:58:48 PM	BCl3 MFC set to  0.000000
3/21/2011	6:58:48 PM	PHl3 MFC set to  0.000000
3/21/2011	6:58:48 PM	SiCl4 MFC set to  0.000000
3/21/2011	6:58:48 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	6:58:48 PM	Tube furnace set to 0
3/21/2011	6:58:48 PM	Run finished at 6:58 PM
3/21/2011	7:42:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	7:42:42 PM	Recipe started at 7:42 PM
3/21/2011	7:42:42 PM	H2 valve closed
3/21/2011	7:42:42 PM	BCl3 valve closed
3/21/2011	7:42:42 PM	PH3 valve closed
3/21/2011	7:42:42 PM	SiCl4 pre valve closed
3/21/2011	7:42:42 PM	SiCl4 post valve closed
3/21/2011	7:42:42 PM	Main Vac valve closed
3/21/2011	7:42:42 PM	Bypass valve closed
3/21/2011	7:42:42 PM	Bubbler valve closed
3/21/2011	7:42:42 PM	Helium valve opened
3/21/2011	7:42:42 PM	Helium MFC set to  500.000000
3/21/2011	7:42:42 PM	H2 MFC set to  0.000000
3/21/2011	7:42:42 PM	BCl3 MFC set to  0.000000
3/21/2011	7:42:42 PM	PHl3 MFC set to  0.000000
3/21/2011	7:42:42 PM	SiCl4 MFC set to  0.000000
3/21/2011	7:42:42 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	7:42:42 PM	Tube furnace set to 0
3/21/2011	7:42:44 PM	Helium valve closed
3/21/2011	7:42:44 PM	H2 valve closed
3/21/2011	7:42:44 PM	BCl3 valve closed
3/21/2011	7:42:44 PM	PH3 valve closed
3/21/2011	7:42:44 PM	SiCl4 pre valve closed
3/21/2011	7:42:44 PM	SiCl4 post valve closed
3/21/2011	7:42:44 PM	Main Vac valve closed
3/21/2011	7:42:44 PM	Bypass valve closed
3/21/2011	7:42:44 PM	Bubbler valve closed
3/21/2011	7:42:44 PM	Helium MFC set to  0.000000
3/21/2011	7:42:44 PM	H2 MFC set to  0.000000
3/21/2011	7:42:44 PM	BCl3 MFC set to  0.000000
3/21/2011	7:42:44 PM	PHl3 MFC set to  0.000000
3/21/2011	7:42:44 PM	SiCl4 MFC set to  0.000000
3/21/2011	7:42:44 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	7:42:44 PM	Tube furnace set to 0
3/21/2011	7:42:44 PM	Run finished at 7:42 PM
3/21/2011	7:42:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2011	7:46:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2011	7:46:59 PM	Recipe started at 7:46 PM
3/21/2011	7:46:59 PM	Helium valve closed
3/21/2011	7:46:59 PM	H2 valve closed
3/21/2011	7:46:59 PM	BCl3 valve closed
3/21/2011	7:46:59 PM	PH3 valve closed
3/21/2011	7:46:59 PM	SiCl4 pre valve closed
3/21/2011	7:46:59 PM	SiCl4 post valve closed
3/21/2011	7:46:59 PM	Main Vac valve closed
3/21/2011	7:46:59 PM	Bubbler valve closed
3/21/2011	7:46:59 PM	Bypass valve opened
3/21/2011	7:46:59 PM	Helium MFC set to  0.000000
3/21/2011	7:46:59 PM	H2 MFC set to  0.000000
3/21/2011	7:46:59 PM	BCl3 MFC set to  0.000000
3/21/2011	7:46:59 PM	PHl3 MFC set to  0.000000
3/21/2011	7:46:59 PM	SiCl4 MFC set to  0.000000
3/21/2011	7:46:59 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	7:47:00 PM	Tube furnace set to 0
3/21/2011	7:47:30 PM	Helium valve closed
3/21/2011	7:47:30 PM	H2 valve closed
3/21/2011	7:47:30 PM	BCl3 valve closed
3/21/2011	7:47:30 PM	PH3 valve closed
3/21/2011	7:47:30 PM	SiCl4 pre valve closed
3/21/2011	7:47:30 PM	SiCl4 post valve closed
3/21/2011	7:47:30 PM	Bubbler valve closed
3/21/2011	7:47:30 PM	Main Vac valve opened
3/21/2011	7:47:30 PM	Bypass valve opened
3/21/2011	7:47:30 PM	Helium MFC set to  0.000000
3/21/2011	7:47:30 PM	H2 MFC set to  0.000000
3/21/2011	7:47:30 PM	BCl3 MFC set to  0.000000
3/21/2011	7:47:30 PM	PHl3 MFC set to  0.000000
3/21/2011	7:47:30 PM	SiCl4 MFC set to  0.000000
3/21/2011	7:47:30 PM	Bypass solenoid MFC set to  0.000000
3/21/2011	7:47:31 PM	Tube furnace set to 0
3/21/2011	7:47:31 PM	Run finished at 7:47 PM
3/21/2011	7:47:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
